Since 1963
ARTICLE
Design and simulation analysis of an integrated xyz micro-actuator for controlling displacement of a scanning probe
1
Hanoi University of Science and Technology, International Training Institute for Materials Science, Hanoi, Vietnam
2
FPT University, Hanoi, Vietnam
3
Tohoku University, Department of Finemechanics, Sendai, Japan
Submission date: 2020-06-18
Final revision date: 2020-10-03
Acceptance date: 2020-10-19
Online publication date: 2020-12-08
Publication date: 2021-01-15
Corresponding author
Manh Hoang Chu
International Training Institute for Materials Science, Hanoi University of Science and Technology, Viet Nam
International Training Institute for Materials Science, Hanoi University of Science and Technology, Viet Nam
Journal of Theoretical and Applied Mechanics 2021;59(1):143-156
KEYWORDS
TOPICS
ABSTRACT
We report an integrated micro-actuator for independent control of the displacement in three
orthogonal directions. Electrostatic comb drives are employed for controlling the displace-
ment in the x and y directions while a parallel plate-type actuation is used for driving the
displacement in the z direction. The three actuators are mechanically coupled, but are elec-
trically isolated. The calculation models are established for investigating the operation char-
acteristics of the micro-actuator. The calculated results are in good agreement with those
obtained by the finite element method in Comsol Multiphysics 4.3. The results of modal
analysis show that the displacement in the three orthogonal directions can be independently
controlled with low mode cross-talk.
REFERENCES (25)
1.
Acar C., Shkel A., 2009, MEMS Vibratory Gyroscopes Structural Approaches to Improve Robustness , Springer Science & Business Media LLC, USA.
2.
Ando Y., 2004, Development of three-dimensional electrostatic stages for scanning probe microscope, Sensors and Actuators A: Physical, 114, 2-3, 285-291.
3.
Bao M., 2005, Analysis and Design Principles of MEMS Devices, 1st ed., Amsterdam: Elsevier B.V.
4.
Bao M., Yang H., 2007, Squeeze film air damping in MEMS, Sensors and Actuators A: Physical, 136, 3-27.
5.
Beer F.P., Johnston E.R., De Wolf J.T., 2003, Mechanics of Materials, Tsinghua University Press, China.
6.
Chu H.M., 2016, Air damping models for micro- and nano-mechanical beam resonators in molecular-flow regime, Vacuum, 126, 45-50.
7.
Chu H.M., Hane K., 2011, Design, fabrication and vacuum operation characteristics of two-dimensional comb-drive micro-scanner, Sensors and Actuators A: Physical, 165, 422-430.
8.
Chu H.M., Mizuno J., Hane K., Takagi T., 2011, Compact slanted comb two-axis micro-mirror scanner fabricated by silicon-on-insulator micromachining, Journal of Vacuum Science and Technology, B 29, 042001.
9.
Correa J., Koo B., Ferreira P., 2016, Parallel-kinematics XYZ MEMS. Part 1: Kinematics and design for fabrication, Precision Engineering, 46, 135-146.
10.
Dong J., Ferreira P.M., 2009, Electrostatically actuated cantilever with SOI-MEMS parallel kinematic XY stage, Journal of Microelectromechanical Systems, 18, 641-651.
11.
Gere J.M., Timoshenko S.P., 1997, Mechanics of Materials, PWS Publishing Company.
12.
Hu H., Kim H., Somnath S., 2017, Tip-based nanofabrication for scalable manufacturing, Micromachines , 8, 3, 90.
13.
Huo F., Zheng G., Liao X., Giam L.R., Chai J., Chen X., Shim W., Mirkin C.A., 2010, Beam pen lithography, Nature Nanotechnology, 5, 637-640.
14.
Kim Y.S., Dagalakis N.G., Gupta S.K., 2014, Design of MEMS based three-axis motion stage by incorporating a nested structure, Journal of Micromechanics and Microengineering, 24, 7, 075009.
15.
Legtenberg R., Groeneveld A.W., Elwenspoek M., 1996, Comb-drive actuators for large displacements, Journal of Micromechanics and Microengineering, 6, 3, 320-329.
16.
Liu X., Kim K., Sun Y., 2007, A MEMS stage for 3-axis nanopositioning, Journal of Micromechanics and Microengineering, 17, 9, 1796-1802.
17.
Liu Y., 2011, Stiffness calculation of the microstructure with crab-leg flexural suspension, Advanced Materials Research, 317-319, 1123-1126.
18.
Sasaki M., Bono F., Hane K., 2008, Large-displacement micro-XY-stage with paired moving plates, Japanese Journal of Applied Physics, 47, 4S, 3226.
19.
Takahashi K., Mita M., Fujita H., Toshiyoshi H., 2009, Switched-layer design for SOI bulk micromachined XYZ stage using stiction bar for interlayer electrical connection, Journal of Microelectromechanical Systems, 18, 4, 818-827.
20.
Trinh T.Q., Nguyen L.Q., Dao D.V., Chu H.M., Vu H.N., 2013, Design and analysis of a z-axis tuning fork gyroscope with guided-mechanical coupling, Microsystem Technologies, 20, 2, 281-289.
21.
Veijola T., Kuisma H., Lahdenperä J., Ryhänen T., 1998, Equivalent-circuit model of the squeezed gas film in a silicon accelerometer, Sensors and Actuators A: Physical, 48, 239-248.
22.
Wang X., Bullen D.A., Zou J., Liu C., Mirkin C. A., 2004, Thermally actuated probe array for paralel dip-pen nanolithography, Journal of Vacuum Science and Technology, B 22, 6, 2563-2567.
23.
Weinberg M,S., Kourepenis A., 2006, Error sources in in-plane silicon tuning-fork MEMS gyroscopes, Journal of Microelectromechanical Systems, 15, 3, 479-491.
24.
Xu H., Ono T., Zhang D.Y., Esashi M., 2006, Fabrication and characterizations of a monolithic PZT microstage, Microsystem Technologies, 12, 9, 883-890.
25.
Zhang W.M., Yan H., Peng Z.K., Meng G., 2014, Electrostatic pull-in instability in MEMS/NEMS: A review, Sensors and Actuators A: Physical, 214, 187-218.
| eISSN: | 2543-6309 |
| ISSN: | 1429-2955 |
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