Since 1963
Author Kazuhiro Hane
ARTICLE
Design and simulation analysis of an integrated xyz micro-actuator for controlling displacement of a scanning probe
Journal of Theoretical and Applied Mechanics 2021;59(1):143-156
- All papers in Journal of Theoretical and Applied Mechanics are published online under the CC BY open access license.
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| eISSN: | 2543-6309 |
| ISSN: | 1429-2955 |
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