Study of a MEMS hybrid thermo-PZT micro actuator
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Department of Mechanical Engineering, Islamic Azad University, Abhar Branch
Publication date: 2016-10-15
Journal of Theoretical and Applied Mechanics 2016;54(4):1309-1318
The current study presents an analytical model for a MEMS cantilever based hybrid thermo--piezoelectric micro actuator. The micro actuator structure consists of a unimorph type bending piezoelectric beam and a passive layer which uses the thermal bimorph principle. Primarily, under electrical and thermal loadings, the governing equations of motion are derived. After verification of the results, the deflection analysis of the micro actuator is performed. Moreover, the equivalent force at the actuator tip is obtained. To provide efficient optimization, the effects of the micro actuator geometrical and materials properties on the actuator tip deflection and force are investigated.
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